Holding and positioning unit for substrate cassettes esp. wafer cassette for processing and/or inspecting - has cassette supporting plate coupled to base plate installed on housing via adjustable, multi-axis guide system

摘要

Two guide rails (24,25) in parallel are assigned to an adjustable cassette support plate (12). These rails have recesses matched to receive the cross-bar at the base of the substrate cassette. A slide arrangement is installed on the support plate. This arrangement enables the guide rails to be slid transversely to their longitudinal direction and to be brought into contact with the inner sides of the long bars (28,29) of the cassette base after the cassette has been mounted. A levelling arrangement installed on the support plate enables a slanting attitude of the substrate plates w.r.t. the substrate cassette base to be compensated. USE/ADVANTAGE - Wafer processing and/or inspection appts. Many different substrate cassette types can be brought into a precise position by a simple setting process and held without play irrespective of thickness of cross-bar and distance between long bars at base.