发明名称 |
Process for the production of functional crystalline film |
摘要 |
There is provided an improved process of forming a functional epitaxial film by using two kinds of active species and chemically reacting them. One of the species is an activated substance which contains silicon atoms or germanium atoms and halogen atoms. The other species is one which is generated from a chemical substance capable of contributing to formation of a film and chemically reactive with the former active species. |
申请公布号 |
US5294285(A) |
申请公布日期 |
1994.03.15 |
申请号 |
US19900469808 |
申请日期 |
1990.01.22 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
KANAI, MASAHIRO;ODA, SHUNRI;SHIMIZU, ISAMU |
分类号 |
C30B25/02;H01L21/205;(IPC1-7):C30B25/14 |
主分类号 |
C30B25/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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