发明名称 ROBOT FOR CONVEYANCE
摘要 <p>PURPOSE:To provide a robot, for conveyance use, wherein vacuum pipes for thin-sheet suction and holding use are installed so as not to come into contact with each other in their operation. CONSTITUTION:Vacuum pipes P, Q extracted individually from two or more vacuum suction holes 5b for thin-sheet holding use are built independently in arms 3, 4, 5 provided with the vacuum suction holes 5b, seal means R are installed in arm rotation parts, O-rings are used as the seal means R, each groove is worked in the inner wall of each of the arms and the vacuum pipes P, Q are formed by opening and closing each opening.</p>
申请公布号 JPH0669317(A) 申请公布日期 1994.03.11
申请号 JP19920221052 申请日期 1992.08.20
申请人 NICHIDEN MACH LTD 发明人 NOGUCHI SHUNJI
分类号 B25J9/06;H01L21/677;H01L21/68;(IPC1-7):H01L21/68 主分类号 B25J9/06
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