| 摘要 |
<p>PURPOSE:To reduce a crossing part area between a first and a second wirings and to reduce short-circuiting without increasing wiring resistance and increasing disconnection by changing the width of wiring selectively only at a part where the first and the second wirings are intersected. CONSTITUTION:In the part 3 where a first wiring layer 1 in a lower layer and a second wiring layer 2 in an upper layer are intersected, one side part of the first wiring layer 1 is recessed by (d) and one side part of the second wiring 2 is recessed by (d'). Then, for instance, when the wiring width L of the first wiring is regarded as 4mum, the wiring width L' of the second wiring as 4mum, the recession (d) of the first wiring at the crossing part as 2mum, the recession (d') of the second wiring as 2mum, against that the area of the crossing between the first, the second wirings is LXL'=16mum<2> usually, for example, the area becomes (L--d)X(L-d')=4mum<2> and becomes to 1/4 in usual, and probability that the area superposes with a defective part in a interlayer insulation film is reduced. Further, since the part except the crossing between the first, the second wirings are not changed with usual wiring width, increase in wiring resistance and increase in disconnection in wiring as well hardly occur.</p> |
