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发明名称
HEAT TREATMENT FURNACE
摘要
申请公布号
JPH0669144(A)
申请公布日期
1994.03.11
申请号
JP19920240003
申请日期
1992.08.17
申请人
TOKYO ELECTRON TOHOKU LTD
发明人
OSAWA SATORU
分类号
H01L21/22;H01L21/324;(IPC1-7):H01L21/22
主分类号
H01L21/22
代理机构
代理人
主权项
地址
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