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发明名称
METHOD OF MAKING SEMICONDUCTOR DEVICE
摘要
申请公布号
KR940001891(B1)
申请公布日期
1994.03.10
申请号
KR19867000087
申请日期
1986.02.15
申请人
HITACHI LTD.
发明人
TAMAKI, YOICHI;SAKATA, KAZUHIKO;HASEKAWA, NORIO;OKAZAKI, SHINJI;TAKAKURA, TOSHIHIKO;NISHIJAWA, HIROTAKA
分类号
H01L27/082;H01L29/72;(IPC1-7):H01L27/082
主分类号
H01L27/082
代理机构
代理人
主权项
地址
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