SEMICONDUCTOR DEVICE AND ITS PRODUCTION,申请号JP19920225833-传众专利搜索

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发明名称	SEMICONDUCTOR DEVICE AND ITS PRODUCTION
摘要
申请公布号	JPH0665746(A)	申请公布日期	1994.03.08
申请号	JP19920225833	申请日期	1992.08.25
申请人	NEC CORP	发明人	SUZUKI MIEKO
分类号	C23C16/40;C23C16/42;H01L21/31;H01L21/316;(IPC1-7):C23C16/40	主分类号	C23C16/40
代理机构		代理人
主权项
地址

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