发明名称 |
Apparatus for large-area ionic etching |
摘要 |
An evacuable tank having gas inlet and gas outlet openings, with at least one large-area anode at ground potential and a cathode provided as a substrate holder disposed substantially parallel thereto and connected to a high-frequency voltage source. The anode surface has step-shaped areas each being spaced at a different distance from the cathode in order to maintain a uniform ion concentration and therefore a uniform plasma.
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申请公布号 |
US5292394(A) |
申请公布日期 |
1994.03.08 |
申请号 |
US19920881530 |
申请日期 |
1992.05.12 |
申请人 |
LEYBOLD AKTIENGESELLSCHAFT |
发明人 |
CORD, BERNHARD;RAUNER, HELMUT |
分类号 |
H01J37/32;(IPC1-7):C23F1/02 |
主分类号 |
H01J37/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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