POSITION DETECTING MECHANISM FOR SEMICONDUCTOR DEVICE,申请号JP19920202824-传众专利搜索

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发明名称	POSITION DETECTING MECHANISM FOR SEMICONDUCTOR DEVICE
摘要
申请公布号	JPH0650714(A)	申请公布日期	1994.02.25
申请号	JP19920202824	申请日期	1992.07.30
申请人	NEC CORP	发明人	TSURUTA HISAYUKI
分类号	G01B11/00;H01L23/00;(IPC1-7):G01B11/00	主分类号	G01B11/00
代理机构		代理人
主权项
地址

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