EXPOSING METHOD TO CHARGED PAPTICLE BEAM,申请号JP19920222160-传众专利搜索

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发明名称	EXPOSING METHOD TO CHARGED PAPTICLE BEAM
摘要
申请公布号	JPH0653127(A)	申请公布日期	1994.02.25
申请号	JP19920222160	申请日期	1992.07.29
申请人	NIKON CORP	发明人	MIYAJI TAKASHI
分类号	G03F7/20;H01L21/027;(IPC1-7):H01L21/027	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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