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发明名称
SEMICONDUCTOR THIN FILM VAPOR GROWTH DEVICE
摘要
申请公布号
JPH0653142(A)
申请公布日期
1994.02.25
申请号
JP19920221920
申请日期
1992.07.29
申请人
FURUKAWA ELECTRIC CO LTD:THE
发明人
HATTORI SATOSHI
分类号
H01L21/205;(IPC1-7):H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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