| 摘要 |
PURPOSE:To provide the flow control valve which can control a minute and continuous exhaust flow rate with high reproducibility in spite of its simple structure. CONSTITUTION:In the flow control valve provided with a pressure outflow port 1-1 for allowing compressed air to flow out into the air, packing 3 contacted with pressure to the pressure outflow port 1-1 and a driving shaft 4 for moving the packing 3 and closing or opening suitably the pressure outflow port 1-1, the driving shaft 4 is supported so as to be movable by providing dampers 9-1, 9-2 energized in the direction for opening the pressure outflow port 1-1 between the driving shaft 4 and a frame 10. |
