| 摘要 |
An electron beam scanning system producing an electron beam in a relatively short chamber includes an ion controlling electrode assembly located between the electron gun and system beam optics. The assembly includes a somewhat cone-shaped rotating field ion controlling electrode ("RICE") unit disposed between first and second ion controlling electrode units ("ICE"s). The RICE and ICEs each comprise element pairs symmetrically disposed on opposite sides of the chamber Z-axis, preferably forming regular polygons in cross-section. Preferably corresponding elements in each ICE are electrically coupled to each other and to an opposite element in the RICE. Preferably equal and opposite bias potentials, with respect to an average potential, are coupled to the RICE and ICE elements comprising an element pair. Because it is somewhat cone-shaped, the RICE and electron beam create a transverse electric field with no axial component. Varying the bias potentials rotates the RICE electric field to controllably remove most but not all positive ions. The remaining ions improve the electron beam space-charge density, resulting in a sharply focused scanning electron beam. The ICE units sweep away positive ions in regions within the overall assembly not otherwise acted upon by fields. A single power source provides multiple potentials via a voltage divider, which potentials are switchably coupled to the RICE and ICE units to provide the required element potentials that may be controllably switched to rotate the resultant electric field in a predictable manner. The complete electrode assembly neither displaces nor deflects the emergent electron beam from the Z-axis.
|
