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发明名称
CLEANING APPARATUS
摘要
申请公布号
JPH0645306(A)
申请公布日期
1994.02.18
申请号
JP19920193727
申请日期
1992.07.21
申请人
HITACHI LTD;HITACHI TECHNO ENG CO LTD
发明人
YOSHINAGA SHOJI;TAKAHARA TAKESHI;ISHIDA MASAHIKO
分类号
B08B3/10;H01L21/304;(IPC1-7):H01L21/304
主分类号
B08B3/10
代理机构
代理人
主权项
地址
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