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经营范围
发明名称
DIFFUSING APPARATUS FOR IMPURITY IN SEMICONDUCTOR WAFER
摘要
申请公布号
JPH0645294(A)
申请公布日期
1994.02.18
申请号
JP19920197273
申请日期
1992.07.23
申请人
NEC CORP
发明人
TSUCHIYA YOSHIAKI
分类号
H01L21/302;H01L21/22;H01L21/3065;(IPC1-7):H01L21/302
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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