| 摘要 |
PURPOSE:To provide a piezoelectric/electrostrictive actuator having excellent manufacturing properties and capable of easily ensuring sealing properties on a joint surface to another member stably. CONSTITUTION:In a piezoelectric/electrostrictive actuator 45, in which a part of the wall section of a pressurized chamber formed into a base body is deformed by a piezoelectric/electrostrictive element, the base body is composed of a ceramic base body 44, in which a spacer plate 70, to which at least one window section 76 is formed, a closing plate 66 and a connecting plate 68, in which a first opening section 72 for communication is shaped at a position corresponding to the window section, are laminated and formed by a green sheet respectively and baked integrally. A piezoelectric/electrostrictive element 78 is constituted of a piezoelectric/electrostrictive operating section consisting of electrodes 75, 77 shaped onto the external surface of the closing plate through a film forming method and a piezoelectric/electrostrictive layer 79 at the same time as the base body is constituted. |
