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发明名称
CONTACT STRUCTURE AND ITS MANUFACTURE
摘要
申请公布号
JPH0629406(A)
申请公布日期
1994.02.04
申请号
JP19910301771
申请日期
1991.11.18
申请人
SONY CORP
发明人
KUBOTA MICHITAKA
分类号
H01L23/522;H01L21/768;(IPC1-7):H01L21/90
主分类号
H01L23/522
代理机构
代理人
主权项
地址
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