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发明名称
VERFAHREN ZUR HERSTELLUNG EINES SUPRALEITFÄHIGEN DÜNNFILMES.
摘要
申请公布号
DE68907209(T2)
申请公布日期
1994.02.03
申请号
DE1989607209T
申请日期
1989.09.14
申请人
OKI ELECTRIC INDUSTRY CO., LTD., TOKIO/TOKYO, JP
发明人
ABE, HITOSHI, OKI ELECTRIC INDUSTRY CO.LTD., MINATO-KU, TOKYO 105, JP;NAKAMORI, TOMOHIRO, OKI ELECTRIC INDUSTRY CO.LTD., MINATO-KU, TOKYO 105, JP
分类号
C23C16/02;C23C16/40;H01L39/24;(IPC1-7):C23C16/30;C01G29/00;H01B13/00
主分类号
C23C16/02
代理机构
代理人
主权项
地址
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