| 摘要 |
<p>A method of correcting data on the positions of chip regions (2) defined on a semiconductor wafer (1), which data is recorded on a map along with data on characteristics of semiconductor devices formed in the chip regions. This method is intended to enable the map to be referred to from positional information shown on the chips separated from the wafer. A chip region at which the center of the map is located is obtained on the basis of coordinate values provided for chip regions on the map in a characteristic test process, and the coordinates on the map are converted so that the coordinates of this chip region are (0, 0). With respect to each of the chip regions (e.g. 2A1) belonging to the fourth quadrant of an orthogonal coordinate system (XY) having an origin at the center of the map, a verification is made as to whether a corresponding chip exists in the other quadrants. If no corresponding chip exists, coordinates for the corresponding chip (e.g. 2a1) in the other quadrants are written on the map. It is thereby possible for deficient chips not selected as characteristic measurement objects to have coordinates written on the map. <IMAGE></p> |
