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发明名称
摘要
申请公布号	JPH064581(Y2)	申请公布日期	1994.02.02
申请号	JP19880046902U	申请日期	1988.04.08
申请人		发明人
分类号	H01L21/60;H01L21/84;H01L25/04;H01L25/18;(IPC1-7):H01L21/60	主分类号	H01L21/60
代理机构		代理人
主权项
地址

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