发明名称 Semiconductor device including very low sheet resistivity buried layer
摘要 A metal or silicide buried layer in MOS semiconductor devices provides a drain contact on the upper surface of the device with a greatly reduced resistance. The methods of manufacture include depositing the buried layer, rather than diffusing, so that interference with other components is greatly reduced and spacing between components is reduced to reduce the over-all size of the device.
申请公布号 US5283454(A) 申请公布日期 1994.02.01
申请号 US19920943642 申请日期 1992.09.11
申请人 MOTOROLA, INC. 发明人 CAMBOU, BERTRAND
分类号 H01L21/336;H01L21/74;H01L29/10;H01L29/41;H01L29/417;H01L29/78;(IPC1-7):H01L29/10 主分类号 H01L21/336
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