| 摘要 |
<p>PURPOSE:To compensate positional displacement at the time of the conveyance of a reticle, etc., safely and positively before a stage is delivered. CONSTITUTION:The quantity of the positional displacement of the position of a substrate 1 held on a substrate carrying member and the proper holding position of the substrate 1 determined on the substrate carrying member is detected by a positional-displacement detecting means 4. A positioning stage S is moved by movement equal to the quantity of positional displacement from an initial position by a stage control means C before the substrate 1 is delivered to the positioning stage S. The substrate 1 is delivered to the positioning stage S at the position, and the positioning stage S is returned to the initial position.</p> |
