EXPOSURE METHOD AND DEVICE,申请号JP19920178046-传众专利搜索

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发明名称	EXPOSURE METHOD AND DEVICE
摘要
申请公布号	JPH0620913(A)	申请公布日期	1994.01.28
申请号	JP19920178046	申请日期	1992.07.06
申请人	MATSUSHITA ELECTRON CORP	发明人	MITO HIDEAKI
分类号	G03B27/72;G03B27/32;G03F7/20;H01L21/027;H01L21/30;(IPC1-7):H01L21/027	主分类号	G03B27/72
代理机构		代理人
主权项
地址

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