| 摘要 |
<p>PURPOSE:To provide an oil free type ball screw for semiconductor manufacturing equipment with solid lubricating mechanism non-conductive with low dusting characteristics, high lubricating ability, high durability and high corrosion resistance. CONSTITUTION:A ball screw is provided with a screw shaft 1 with the spiral inner track face 1a formed at the outer peripheral surface, a ball nut 2 with the spiral outer track face 2a formed at the inner peripheral surface, plural balls 3 disposed at a spiral space formed between the inner and outer track faces 1a, 2a, and a ball circulating path. Diameter contractible C-shape seal rings 4 formed of ethylene tetrafluoride-ethylene perfluoroalkoxyde copolymer resin (PFA) with coil springs 7 mounted to the outer periphery are mounted to both ends of the ball nut 2 of the ball screw.</p> |
