发明名称 PELLET PUSHING PIN SETTING METHOD
摘要 <p>PURPOSE:To enable the original position of a pushing pin to be easily and accurately recognized so as to enhance an pellet bonding operation in productivity. CONSTITUTION:When a distance (z) between the tip of a pushing pin 13 and a pellet 1 is measured, a suction collet 15 is made to descend to hold the pellet 1 by sucking, thereafter the collet 15 is made to ascend by a distance of alphaand stopped, the pushing pin 13 is made to ascend by a distance of beta till its tip bears against the surface of the pellet 1 opposed to its surface sucked by the collet 15, a distance of beta is measured, and a is obtained by solving a formula z=beta-alpha.</p>
申请公布号 JPH065690(A) 申请公布日期 1994.01.14
申请号 JP19920185671 申请日期 1992.06.22
申请人 TOSHIBA SEIKI KK 发明人 OKUYAMA YUTAKA
分类号 H01L21/52;H01L21/301;H01L21/67;H01L21/68;H01L21/78;(IPC1-7):H01L21/68 主分类号 H01L21/52
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