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发明名称
摘要
申请公布号
JPH062696(U)
申请公布日期
1994.01.14
申请号
JP19920042072U
申请日期
1992.06.18
申请人
发明人
分类号
H01L21/66;G01R1/06;G01R31/28;(IPC1-7):H01L21/66
主分类号
H01L21/66
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代理人
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