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发明名称
TEMPERATURE CONTROL DEVICE AND TEMPERATURE MEASURING METHOD
摘要
申请公布号
JPH065683(A)
申请公布日期
1994.01.14
申请号
JP19920186220
申请日期
1992.06.18
申请人
MITSUBISHI ELECTRIC CORP
发明人
SENBA SHINJI
分类号
G01K7/16;G01K13/00;G05D23/19;H01L21/66;(IPC1-7):H01L21/66
主分类号
G01K7/16
代理机构
代理人
主权项
地址
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