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发明名称
Sputer deposition of nickel-iron-manganese ferromagnetic films
摘要
申请公布号
US3399129(A)
申请公布日期
1968.08.27
申请号
US19650507847
申请日期
1965.11.15
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
FLUR BARRY L.;GRIEST ANDREW J.
分类号
C23C14/35;H01J37/34
主分类号
C23C14/35
代理机构
代理人
主权项
地址
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