NEGATIVE PHOTORESIST COMPOSITIONS AND PROCESSES FOR PREPARING THERMALLY STABLE,NEGATIVE IMAGES USING THEM,申请号HK19930001434-传众专利搜索

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发明名称	NEGATIVE PHOTORESIST COMPOSITIONS AND PROCESSES FOR PREPARING THERMALLY STABLE,NEGATIVE IMAGES USING THEM
摘要
申请公布号	HK143493(A)	申请公布日期	1994.01.07
申请号	HK19930001434	申请日期	1993.12.30
申请人	ROHM AND HAAS COMPANY	发明人	FEELY, WAYNE EDMUND
分类号	G03F7/004;G03F7/029;G03F7/038;G03F7/38;G03F7/40;H01L21/027;(IPC1-7):G03F7/038	主分类号	G03F7/004
代理机构		代理人
主权项
地址

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