| 摘要 |
The microvalve of the invention is made up in layers of at least one lower part (11), a central part (12) and an upper part (13). The sealing ring (31) (closing member), the valve plate (29) (pressure equalisation area) and the diaphragm (26) are integrated into the central part (12), this one-piece component being produced by a plastic moulding process. The valve is actuated by anelectric operating device, e.g. an electrostatic, electromagnetic or piezoelectric drive. Especially in the case of an electrostatic drive, two electrodes (17, 22) are applied in layers to the central part (12) or the lower part (11). The lower, central and upper parts are put together and permanently bonded, e.g. adhesively or by welding. |
