发明名称 Method of forming bonding bumps by punching a metal ribbon
摘要 Disclosed is a method of forming bonding metal bumps on electrodes of a submount for use with an optical device array. Small bonding metal pieces are arranged on a transfer piece resting substrate so as to be aligned with the electrodes of the submount. Next, the bonding metal pieces thus arranged are transferred onto respective electrodes of the submount. In one embodiment, bonding metal pieces are preferably formed by punching a ribbon-shaped bonding metal and respectively fixed by a force of the punching operation directly onto the electrodes of the submount.
申请公布号 US5275970(A) 申请公布日期 1994.01.04
申请号 US19910777903 申请日期 1991.10.17
申请人 NEC CORPORATION 发明人 ITOH, MASATAKA;HONMOU, HIROSHI
分类号 H01L21/48;H01L21/60;H01L33/30;H01L33/40;H01L33/62;H05K3/34;(IPC1-7):H01L21/283;H01L21/603 主分类号 H01L21/48
代理机构 代理人
主权项
地址