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发明名称
DEVICE FOR LIQUID-PHASE EPITAXIAL GROWTH
摘要
申请公布号
JPH05345694(A)
申请公布日期
1993.12.27
申请号
JP19920152341
申请日期
1992.06.11
申请人
MITSUBISHI HEAVY IND LTD
发明人
YONEKURA YOSHIMICHI
分类号
C30B19/06;H01L21/208;(IPC1-7):C30B19/06
主分类号
C30B19/06
代理机构
代理人
主权项
地址
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