发明名称 MANUFACTURE OF SEMICONDUCTOR DEVICE AND ITS MANUFACTURE DEVICE
摘要 <p>PURPOSE:To prevent the contact between the metallic fine wire stuck to a flexible resin film and a semiconductor chip. CONSTITUTION:A semiconductor chip 4, on one side of which bumps 4a being a plurality of electrodes are formed, is installed in the recess of a mount base 2, where a recess 2a with an opening area capable of accommodating the semiconductor chip 4 and a thickness a little larger than that of the semiconductor chip is made, and the positioning with the metallic fine wire 5a provided on the flexible resin film 5 arranged on its top is performed, and then it is bonded by pressing a bonding tool 3, which has heating and pressurizing means, fast against the metallic fine wire.</p>
申请公布号 JPH05347331(A) 申请公布日期 1993.12.27
申请号 JP19920154997 申请日期 1992.06.15
申请人 ROHM CO LTD 发明人 HIRAI MINORU
分类号 H01L21/52;H01L21/60;H01L21/68;(IPC1-7):H01L21/60 主分类号 H01L21/52
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