| 摘要 |
PURPOSE:To obtain a defect detecting method by which a candidate defective part which has a delicate density difference against a background picture can be detected equally to visual inspections at the time of detecting the defect of an object to be inspected by using the variable density picture of the object. CONSTITUTION:This method contains a background picture density value setting process #2 for setting the density value of a background picture from the density-wise frequency of density data of each picture element of a variable density picture and a candidate defective part detecting process #3 for detecting a candidate defective part in which such picture elements that the density differences between the density data of the picture elements and the density value of the background picture exceed an arbitrary density difference threshold adjacently exist. In addition, the method also contains a evaluating value calculating process #3 for calculating the density difference of each picture element at each detected candidate defective part by using an arbitrary calculating method and an evaluating value by totalizing calculated results, first evaluating threshold setting process #5 for setting the first evaluating threshold which corresponds to the evaluating value calculating method, and first defective part detecting process #6 for detecting a defective part by comparing the evaluating value with the first evaluating threshold. |
