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发明名称
SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
摘要
申请公布号
JPH05343510(A)
申请公布日期
1993.12.24
申请号
JP19920145208
申请日期
1992.06.05
申请人
TOSHIBA CORP
发明人
KAMEI SATOSHI
分类号
H01L21/762;H01L21/331;H01L21/76;H01L27/12;H01L29/73;H01L29/732;(IPC1-7):H01L21/76
主分类号
H01L21/762
代理机构
代理人
主权项
地址
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