| 摘要 |
PURPOSE:To obviate complication of management of the mask film which is stuck to the surface of the mask film and displays a defect in a window, and also, to exactly correct the defect. CONSTITUTION:Based on defect information inputted from a means for detecting a defect of a pattern formed on a mask film MF, in a defect corresponding part of a repair film RF stuck onto the surface of the mask film, a cutting part 23 for cutting a window W for unmasking its defect part is provided. This cutting part 23 is constituted so that by moving a cutting head 232 having a minute cutter 235, and also, operating the minute cutter 235, the window W of arbitrary size and shape can be opened in the defect corresponding position of the repair film RF. |
