FORMATION OF METAL WIRING,申请号JP19920150704-传众专利搜索

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发明名称	FORMATION OF METAL WIRING
摘要
申请公布号	JPH05343398(A)	申请公布日期	1993.12.24
申请号	JP19920150704	申请日期	1992.06.10
申请人	SONY CORP	发明人	ARASE KENSHIROU
分类号	H01L21/28;H01L21/302;H01L21/3065;H01L21/3205;H01L21/3213;H01L21/768;H01L23/52;H01L23/522;H01L29/78;(IPC1-7):H01L21/320;H01L21/90;H01L29/784	主分类号	H01L21/28
代理机构		代理人
主权项
地址

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