发明名称 SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
摘要 PURPOSE:To obtain a semiconductor device of high density and high performance at a low cost, by reducing the occupied area by a capacitor while keeping the capacitance constant. eliminating difference of capacitor characteristics like permittivity due to the applied voltage direction, and reducing manufacturing process. CONSTITUTION:The surfaces on which dielectric substance 110 of a capacitor comes into contact with electrodes 112, 113 are vertical to a semiconductor substrate 101. The two electrodes of the capacitor are formed at the same time before the dielectric substance is formed. The whole part or a part of the substrate except bonding pads of a wiring layer 107 is covered with the whole part or a part of the dielectric substance.
申请公布号 JPH05343615(A) 申请公布日期 1993.12.24
申请号 JP19920149519 申请日期 1992.06.09
申请人 SEIKO EPSON CORP 发明人 KATO KOJI
分类号 H01L27/04;H01L21/822;H01L21/8242;H01L21/8246;H01L21/8247;H01L27/10;H01L27/105;H01L27/108;H01L29/788;H01L29/792 主分类号 H01L27/04
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