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发明名称
摘要
申请公布号
FR2641127(B1)
申请公布日期
1993.12.24
申请号
FR19880017091
申请日期
1988.12.23
申请人
THOMSON HYBRIDES MICROONDES
发明人
分类号
H01L27/04;G05D23/24;G05F3/08;G05F3/24;H01L21/822;(IPC1-7):H01L27/00;G01K7/24
主分类号
H01L27/04
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代理人
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