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发明名称
Method of manufacturing a device.
摘要
申请公布号
EP0355913(B1)
申请公布日期
1993.12.22
申请号
EP19890202086
申请日期
1989.08.15
申请人
N.V. PHILIPS' GLOEILAMPENFABRIEKEN
发明人
BIERMANN, UDO KLAUS PAUL;SPIERINGS, GIJSBERTUS ADRIANUS CORNELUS MARIA;VAN DER KRUIS, FRANCISCUS JOSEPHUS HENRI MARIA;HAISMA, JAN
分类号
G02B6/13;C03C19/00;C03C27/00;H01L21/20;H01L31/0203;(IPC1-7):H01L21/316;H01L21/18;H01L21/306;H01L21/70;H01L31/048
主分类号
G02B6/13
代理机构
代理人
主权项
地址
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