Isolation structure for contamination sensitive items,申请号US19920950110-传众专利搜索

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发明名称	Isolation structure for contamination sensitive items
摘要
申请公布号	US5271516(A)	申请公布日期	1993.12.21
申请号	US19920950110	申请日期	1992.09.24
申请人	INTERNATIONAL BUSINESS MACHINES CORPORATION	发明人	COOK, LAWRENCE G.;FLORENCE, JR., ROBERT F.;GALLAGHER, GARY M.;JOHNSON, GORDON E.;SARGENT, ROBERT W.
分类号	B65D8/18;B65D81/18;B65D81/20;B65D85/57;B65D85/86;F16J13/02;F16J15/46;H01L21/673;(IPC1-7):F16L55/00	主分类号	B65D8/18
代理机构		代理人
主权项
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