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发明名称
CLEAN ROOM SYSTEM
摘要
申请公布号
JPH05340581(A)
申请公布日期
1993.12.21
申请号
JP19920149709
申请日期
1992.06.09
申请人
YAMAKAWA RETSU
发明人
YAMAKAWA RETSU
分类号
E04H5/02;F24F7/06;H01L21/02;(IPC1-7):F24F7/06
主分类号
E04H5/02
代理机构
代理人
主权项
地址
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