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发明名称
SPUTTERING DEVICE
摘要
申请公布号
JPH05339727(A)
申请公布日期
1993.12.21
申请号
JP19920149143
申请日期
1992.06.09
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
OKAMOTO TADASHI;YAMANISHI HITOSHI;TANAKA KUNIO;NISHIHARA MUNEKAZU
分类号
C23C14/35;H01F41/18;(IPC1-7):C23C14/35
主分类号
C23C14/35
代理机构
代理人
主权项
地址
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