INSPECTION DEVICE OF IMAGE PATTERN

摘要

PURPOSE:To inspect an image pattern without passing by any defects of an object as a reference. CONSTITUTION:A switching part 7 switches one and the other of an object image signal OS and a master image signal MS based on a switching signal which is given arbitrarily and outputs them as first and second object image signals SS1 and SS2. A comparison inspection part 8 compares a part corresponding to each one of an evaluation section of an image pattern which is expressed by the first object signal SS1 and a plurality of compensation sections with a part corresponding to an evaluation section of image pattern which is expressed by the second object image signal SS2, thus that there are defects in the evaluation section when a difference exceeding a specified level is found in the evaluation section and hence detecting all defects in the master image signal MS without fail.