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发明名称
DRY ETCHING METHOD
摘要
申请公布号
JPH05335285(A)
申请公布日期
1993.12.17
申请号
JP19920140654
申请日期
1992.06.01
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
TANAKA YASUO;HOUCHIN RIYUUZOU;TSUTSU HIROSHI;MIYATA YUTAKA
分类号
C23F4/00;H01L21/302;H01L21/3065;H01L21/336;H01L29/78;H01L29/786;(IPC1-7):H01L21/302
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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