| 摘要 |
PURPOSE:To provide an aligner which is of high speed, high in accuracy, low in cost, and excellent in reliability by protecting it from rotational vibration without using any of a detection means, an actuator, and a control device all used in a conventional technique for removing rotational vibrations. CONSTITUTION:A light exposure device is composed of a stage 5 where a substrate 4 is positioned, an image-forming system which forms an image that is exposed on the substrate 4, a structure 7 which supports the stage 5 and the image-forming system, and a vibration-removing device provided between the structure 7 and a floor, where a support means 10 rigid along a direction in which the structure is inclined is provided between the structure 7 and the floor. |
