发明名称 JOSEPHSON JUNCTION STRUCTURE BODY AND MANUFACTURE THEREOF
摘要 PURPOSE:To facilitation manufacturing and improved performance by forming an oxide superconductive thin film with a crystalline grain boundary at a step part. CONSTITUTION:An NaCl layer 14 is formed on a substrate 5 where a photoresist layer 13 is formed. Then, the NaCl layer 14 is left only at the left side of the substrate forming surface by eliminating the photoresist layer 13. Then, an MgO layer 15 is formed on the substrate 5. Then, when the substrate 5 where the MgO layer 15 is formed is washed, the NaCl layer 14 as well as a part on the NaCl layer 14 of the MgO layer 15 are eliminated, the MgO layer 15 remains only at the right side on the substrate surface, and a step is formed. Finally, when an Y1Ba2Cu3O7-X oxide superconductive thin film is formed on the substrate 5 where the step is formed, a part on the edge of the MgO layer 15 becomes a crystalline magnetic field 3. Therefore, a part 2 on the MgO layer 15 of the Y1Ba2Cu3O7-X oxide superconductive thin film and a part 1 which is directly formed on the substrate become a Josephson junction with the crystalline grain boundary 3 as a barrier wall.
申请公布号 JPH05335638(A) 申请公布日期 1993.12.17
申请号 JP19920164151 申请日期 1992.05.29
申请人 SUMITOMO ELECTRIC IND LTD 发明人 TANAKA SABURO;MATSUURA TAKASHI;ITOZAKI HIDEO
分类号 H01L39/22;H01L39/24;(IPC1-7):H01L39/22 主分类号 H01L39/22
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