发明名称 Halbleiterlaser von eingebettetem Struktur-Typ und dessen Herstellungsverfahren.
摘要 In an embedded type semiconductor laser, at least three layers of a first conduction type clad layer, a quantum well active layer which contains a first or second conduction type or a pn junction, and a second conduction type clad layer, are grown successively on a first conduction type substrate. A high concentration impurity doped layer is provided excluding a predetermined striped region, situated adjacent to the active layer. An impurity diffusion is carried out by heat treatment which diffuses dopant from the high concentration impurity doped layer to the active layer.
申请公布号 DE3786934(T2) 申请公布日期 1993.12.16
申请号 DE19873786934T 申请日期 1987.01.08
申请人 KABUSHIKI KAISHA TOSHIBA, KAWASAKI, KANAGAWA, JP 发明人 FURUYAMA, HIDETO, OOTU-KU TOKYO, JP;KUROBE, ATSUSHI, KAWASAKI-SHI KANAGAWA-KEN, JP
分类号 H01L21/308;H01L21/306;H01S5/00;H01S5/06;H01S5/20;H01S5/34 主分类号 H01L21/308
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