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发明名称
HEXODE-TYPE REACTIVE ION ETCHING EQUIPMENT
摘要
申请公布号
JPH05326448(A)
申请公布日期
1993.12.10
申请号
JP19920130348
申请日期
1992.05.22
申请人
NEC YAMAGUCHI LTD
发明人
NAKAO YASUKI
分类号
H01L21/302;H01L21/3065;(IPC1-7):H01L21/302
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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