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发明名称
Confined water fixture for holding wafers undergoing chemical-mechanical polishing
摘要
申请公布号
US5267418(A)
申请公布日期
1993.12.07
申请号
US19920890041
申请日期
1992.05.27
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
CURRIE, JAMES E.;SCHULZ, RONALD N.;TICKNOR, ADAM D.
分类号
B23Q3/08;B24B37/04;H01L21/304;(IPC1-7):B24B41/06
主分类号
B23Q3/08
代理机构
代理人
主权项
地址
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